Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor

  • G.I. Barylo Lviv Polytechnic National University
  • R.L. Holyaka Lviv Polytechnic National University
  • T.A. Marusenkova Lviv Polytechnic National University
  • M.S. Ivakh Lviv Polytechnic National University
Keywords: 3-D magnetic sensor, split Hall structures, SPICE model


Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections BX, BY, BZ of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.


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How to Cite
BaryloG., HolyakaR., MarusenkovaT. and IvakhM. 2021. Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor. Physics and Chemistry of Solid State. 22, 3 (Aug. 2021), 444-452. DOI:
Scientific articles (Technology)

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